JR Automation’s Semiconductor Substrate Panel Handling EFEMs are the ideal front-end solution for handling Copper Core, Glass Core and Glass Panels for process modules dedicated to production of High Density Interconnect substrate for semiconductor packages.
Also referred to as Panel Handling LOT Sorters or Panel Loaders/Unloaders, these EFEMs are compliant with SEMI standards and other standards relevant to your products and the requirements of semiconductor manufacturers. They are customizable to meet your specific needs and can handle up to 600 x 600 mm substrate panels.
These panel handling EFEMs are compliant with a wide range of SEMI, safety and industry standards for design, communication and operation of equipment used in semiconductor manufacturing:
Contact our team of experts to learn more about how our Semiconductor Substrate Panel Handling EFEMs can work for you.