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Micro Precision Force Measurement Platform
challenge
A US manufacturer supplying interconnect components to the semiconductor industry required an automated, contact force measurement system capable of measuring compression forces of very small devices on a 300mm substrate.
Scaling their products for the larger wafer size, the customer required an easily configurable system for testing thousands of measurements over a multitude of part types at a rate of up to 3,000 tests per hour, providing accurate force and height data.
solution
To measure the device accurately, the system was required to measure forces between 0-30 grams over a 50µm compressed distance. The device height values had to be determined to within ±2.5µm over the entire 300mm envelope. To meet these requirements, the team designed a standard platform for testing the device. Features of the platform include:
- Mapping of the XY axes using a glass reticle grid plate to improve XY accuracy
- Automatic mapping of the Z axis to an optical flat to provide planar accuracy
- Custom, low mass, air bearing Z-axis stage with voice coil servo motor and accelerometer utilizing servo system and feed-forward algorithms to precisely measure force and height
- Automatic mapping of force constants within 0.019 N/mm
- Automatic mapping of measured heights within 2.5µm
outcomes and benefits
ABOUT JR AUTOMATION
JR Automation provides intelligent automated manufacturing and distribution technology solutions. We transform how the world's leading manufacturers make and distribute products.
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